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X光繞射法分析鈷鉑薄膜結構
Thesis

X光繞射法分析鈷鉑薄膜結構

詹佳璁
Masters, 國立清華大學, 工程與系統科學系
1999

Abstract

多層膜 垂直磁異向性 X光繞射 X光反射率 X光螢光 分子束磊晶 Cobalt Platinum multilayer Perpendicular Magnetic Anisotropy X-ray diffraction X-ray reflectivity X-ray fluorescence Molecular Beam Epitaxy
In this study, the structure determination of the epitaxial [Co(t nm)/Pt(1 nm)]30 magnetic multilayer samples (t=1, 0.5, 0.4, 0.3, 0.25 and 0.2 nm) were aimed. The samples were prepared mainly on Pt(111)/Mo(110)/ Al2O3(11-20) substrates and also certain of different substrates in the MBE chamber. Due to the inaccuracy of quartz monitor in thickness measurement, we combined two other methods — the X-ray reflectivity method and the X-ray fluorescence method to obtain the more exact layer thickness in the Co/Pt multilayer. X-ray measurement have discovered that the Pt(111) can be grown epitaxially on the Mo(110) buffer layer. It was also found that the in-plane orientation relation between Mo and Pt layer closed to the Nishiyama-Wasserman model, but the Pt[01-1] is rotated 0.4°azimuthally from the Mo[001]. The Pt layer in the multilayer has a compressible strain of about 2-3.5% along the in-plane direction. In addition, the saturation magnetization in the samples with different Co layer thickness is roughly proportional to this strain and the coercive force in the samples with different Pt layer thickness is roughly inverse proportional to this strain. These experimental results reveal the generalization of the Co/Pt thin film structure. Consequently, a realization of the Co/Pt structural properties can be upgraded, thereby enhancing the basis for the prospective study of the Co/Pt magnetic properties. In this thesis, a C-language based control system was designed to control a home-made 4-circles diffractometer via General Purpose Interface Bus(GPIB) and acquire X-ray counts from scintillation counter via 8254 integrated circuit. Now, we can independently achieve x-ray diffraction experiment of single crystal in our X-ray laboratory.

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