Abstract
A lot of theses prove the accuracy of field solver through a test structure set with known data. Some theses would provide some empirical formulas or a simulator, and these theses prove their empirical formula or simulator is better than field solver through time complexity. In my thesis, I provide a rich set of impartial test structure sets without the data of parasitic capacitance. And, my thesis uses two field solvers, CLEVER and Raphael, to measure the values of parasitic capacitance from these impartial test structure sets. The impartial test structure sets are divided into five types of test structure. According to the five types of test structure, I prove CLEVER and Raphael which are correct through the values of parasitic capacitance. I write an automatic program using PERL in Linux operating system. This automatic program can generate CLEVER and Raphael test structures. It can also gather statistics such as the value of parasitic capacitance, errors of two pieces of software, and the corresponding XGRAPH diagrams. By these information, I comment on the accuracy, speed, user-friendliness and computing resource between CLEVER and Raphael for the benefits of the IC industry in Taiwan.