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一維金-氧化鎵核殼奈米線的電阻轉換性質研究
Thesis

一維金-氧化鎵核殼奈米線的電阻轉換性質研究

Chiang, Chih-Chien
Masters, 國立清華大學, 材料科學工程學系
2009

Abstract

奈米線 電阻轉換 核殼奈米線 金-氧化鎵 氧化鎵 電阻式記憶體 Nanowire Resistance Switching Core Shell Au-Ga2O3 gallium oxide RRAM
At first, we tried to optimize the growth condition of Au-Ga2O3 core-shell nanowires with 150 nm Au particles under the reaction temperature of 800℃ and the pressure of 1×10-2 torr. Afterwards, we used SEM, XRD, TEM to analyze the surface morphology, crystalline structure and the composition of pure Ga2O3 nanowires and Au-Ga2O3 core-shell nanowires. Besides, we fabricated the nanodevices by the optical microscope equipped with manipulator and a series of standard electron beam lithography (EBL) techniques. Finally, we measured the I-V characteristics and resistive switching behaviors of the pure and core-shell Ga2O3 nanowires in Keithley 4200. We also designed nanodevices with different electrode distances and diameters to discuss the characteristics.

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