Abstract
The study of the electrical properties of neuronal networks is important for the characterization of their biological functions and behavior. The electrical activity of cells is mostly recorded by single electrodes, but only few cells can be monitored at the same time. Development of Multielectrode array contributes to understand function of neuronal networks. The geometry of 3D multielectrode array allows a good penetration of the electrodes into tissue, getting closer to the active cells and reduces damage of the cells when recording bio-signal, but combination of 3D multielectrode and signal line is a challenge by semiconductor process.Based on the shape of micro-tip etch test process, this study develop a novel and simple process within three masks. Through this process avoiding the problem of high topology, the number of 10 ×10 multielectrode array that combination 3D multielectrode array with each signal line has been proposed successfully. Furthermore, this study intends to present the concept of integration of 3D multielectrode array with pre-amp. It can be expected the new design will improve the performance of 3D multielectrode array.