Abstract
In this study, a novel three-axis driven micro robot arm was design and fabricated. The robot arm consists of a three-axis position stage and a micro gripper. Moreover, the structures of this robot arm were monolithically integrated using bulk micromachining process on (111) silicon wafer. Hence, its in-plane and out-of-plane positions are precisely controlled by two comb drive actuators and a vertical comb, respectively.In applications, the robot arm can be exploited as a manipulator in the area of Nano and Bio technologies. For instance, it will be useful to assemble the micro and nano components. The robot arm also has the potential to manipulate cells and conducting microsurgery.