Abstract
Micro Electromechanical System technology integrates micro-sensors, micro-actuators, micro-controllers, and micro-structures into a silicon device with specific features as a system. In particular, micro fluid devices have been especially important because many key components, namely valves, flow sensors, channels, and pumps, have been developed for industrial applications in recent years. Among the above components, traditional micro-pumps have employed thin films for generating mechanical motions that induce valve wear due to pressure variations; and, with vibrating thin films the micro-pump cannot deliver continuous flow. Therefore, the objective of this study is to investigate the pumping effects of electromagnetic Lorentz force in electric-conducting liquid driven by alternating current so that electrolysis of fluid can be circumvented.This thesis is to study and analyze the electromagnetic Lorentz forces in electric-conducting aqueous saline solutions submerged under alternating magnetic field. In 1-D flow analysis, Navier-Stokes equations are simplified for solving flow field under electromagnetic interactions driven with alternating currents under closed-loop control. Furthermore, electronic circuit analysis software has been used for designing the power operational amplifier circuits together with the magnetic circuits being simulated via Finite Element Method programs. Effects of size on the flow channel, the AC magnetic field, the AC electric field, and the operating frequency have been carefully studied so that conclusions for assessing design parameters for a practical AC operated MHD micro-pump are made.