Abstract
In this study, a capacitive type CMOS-MEMS tactile-sensor containing a sensing gap filled with polymer. The fabrication process allows the changing of polymer material easily. Thus, the characteristics (sensing range, sensitivity) of the CMOS-MEMS tactile-sensor can be easily tuned by varying the polymer material. In application, the tactile-sensor and sensing circuits have been designed and implemented using (1) TSMC 0.35μm 2P4M CMOS process, and (2) in-house post-CMOS releasing and polymer-filling processes. Measurement results demonstrate the sensitivity and sensing range of CMOS-MEMS tactile-sensor are easily tuned by changing the polymer materials.