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以PECVD製備奈米碳管量子點及其氣體偵測與光電性質應用
Thesis

以PECVD製備奈米碳管量子點及其氣體偵測與光電性質應用

胡嘉德
Masters, National Tsing Hua University
2007

Abstract

奈米碳管氧氣電漿處理導電特性場發射氣體偵測酒精奈米混成複合物光電特性 Carbon nanotubesOxygen plasma treatmentElectronic propertiesField emissionGas sensorEthanolNano2hybrids compositesOptoelectronics properties
In this study, we use the microwave plasma enhanced chemical vapor deposition (MPECVD) system to synthesize the carbon nanotubes, and observe the structures, chemical bonding and the field emission properties of carbon nanotubes. From using clamped substrate can produce self-oriented regular arrays carbon nanotubes without bias-voltage or catalyst pattern.It is found that oxygen plasma treatment using MPECVD can increase the sp2 bonding which can enhance the abilities of gas adsorption, electronic properties, and field emission. The MWCNTs-based gas sensor for detecting ethanol molecules have been studied, which could detect the ethanol at a ppm-level, and the conductance of the sensors decreases when the sensors are exposed to the ethanol gas at room temperature. Successful utilization of CNTs in gas sensors may open a new window for the development of novel nanostructure gas-devices.Semiconductive quantum dots (QDs) that exhibit quantum confinement effect have drawn significant attention. ZnO is a typical Ⅱ-Ⅵ semiconductive material with wide band gap, and high photo emission efficiency. In this work, we will synthesize nano2hybrids composites Carbon-Zinc-Oxide (CZO) nanotubes by thermal evaporation and discuss its optoelectronics properties.

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