Abstract
In this thesis, we discuss the feasibility of holographic LEED and Patterson LEED for probing the surface reconstruction and relaxation structure.We collected the LEED patterns of Si(113)-3×2 surface in 54 different energies and obtained the LEED I-V curves. Then, the LEED I-V curves would be inverted with the holographic inversion and Patterson inversion to obtain the final results. The results of Patterson LEED from integral order LEED spots are consistent with bulk structure. However, the results of holographic LEED from integral order LEED spots have discrepancies compared with bulk structure. For fractional order LEED spots, the results of Patterson LEED support Buckling Tetramer Ranke's Model for Si(113)-3×2 surface. However, the results obtained by holographic LEED are not consistent with the Buckling Tetramer Ranke's Model for Si(113)-3×2 surfaceAs a result, it shows that Patterson LEED is feasible for checking surface structure model, but holographic LEED is not a feasible method. Patterson LEED may become one of the standard methods for determining the surface structure model in the future.