Abstract
In MEMS technology, there are many thin-film materials which can be applied to fabricate actuators. The material properties of silicon are better than those of metal. We propose a bulk-mocromachining process using the SOI (Silicon On Insulator) wafer to fabricate the micro media actuator (MMA) for the probe-based data mass storage in the thesis. Linear surface drives were first suggested by Trimmer and Gabriel as an efficient method of achieving a large travel range describes the design and fabrication of an actuator that is intend to more 50 um at 100 V. An electrostatic micro XY stage with a large displacement, a highly precise position control, and a low actuation voltage are essential for the Electrostatic Force Microscopy Probe-based data storage (EFMPDS) in the thesis. The proposed MMA fabricated by the high-aspect-ratio each of single crystal silicon has good performance in reliability and stability. To achieve an EFMPDS with an extremely high density, the stage with a large displacement and precise resolution is desired. We hope to accomplish the MMA successfully, and apply it in PDS application.