Abstract
This thesis presents a SOI-base MEMS resonant magnetometer. By way of theoretical analysis, simulation, process development and field measurement, a Lorentz force MEMS resonant magnetometer for geomagnetic field detection has been implemented. The presented MEMS resonant magnetometer has features of:(1) fabrication process is reduced by buried-oxide defined sensing gap, (2)improved sensitivity by reducing sensing gap thickness, (3)multi-axis detection magnetometer can be accomplished by means of structural design and electrical interconnection between device and handle layer, (4)MEMS inertial sensor compatible process for sensor integration. Furthermore, according to design concept of 1-axis magnetometer, a 3-axis magnetometer for compass application has been deigned.