Abstract
The FTIR system was used to study the calibration factor of the amount of water adsorption on aluminum surface to the intensity of the IR absorption spectrum. In addition, a TDS system was established at the same vacuum system to measure the amount of water desorption during thermal desorption process. The calibration factor was measured as 7.5±54% layer/absorption in this experiment. For the TDS experiment, an aluminum sample was heated up to 550℃ at a rate of 0.25˚K/s after being exposed to water vapor at 6.5x10^(-7)Pa for 40 mins. The results showed that the desorption peaks appeared at 342℃ and 413℃. The corresponding desorption energy were (39.9±5%) kcal/mol and (46.9±1.5%) kcal/mol. The amounts of water vapor desorbed were 2.9x10^13 and 8.6x10^17 molecules for the heating process under and above 0℃, respectively. These numbers are different from the data of 1.3x10^16 molecules measured by the FTIR analysis. There were two reasons about the difference that the effect of the background from sample holder and the interfered from the scattered heating IR.