- Title
- 以二氟次矽基與四氯甲烷、四鹵化鍺為先驅物製作薄膜之研究
- Translated title
- 以二氟次矽基與四氯甲烷、四鹵化鍺為先驅物製作薄膜之研究
- Creators
- 張文瑞 (Author)
- Contributors
- 劉兆玄 (Advisor)
- Awarding Institution
- National Tsing Hua University; Masters
- Theses and Dissertations
- Masters, National Tsing Hua University
- Resource Type
- Thesis
- Language
- English
Thesis
以二氟次矽基與四氯甲烷、四鹵化鍺為先驅物製作薄膜之研究
Masters, National Tsing Hua University
1995
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