Abstract
The fabrication of nickel oxide nanostructures by atomic force microscopy (AFM) nano-oxidation and its application to the selective growth of carbon nanotubes (CNTs) is described in this thesis. By applying a voltage pulse between the conductive tip and a nickel film, the local electrochemical processes occurs and transforms nickel into nickel oxide. Auger electron spectroscopy (AES) and X-ray energy dispersive spectroscopy (EDS) are used to characterize the chemical compositions of the produced nickel oxide. By varying the voltages and pulse durations, the size of the nickel oxide can be controlled and nanodots with a diameter of around 50 nm are produced.After the AFM nano-oxidation process, the nickel film is etched away in a diluted nitric acid whereas the nickel oxide pattern is preserved. The nickel oxide is reduced to nickel to facilitate CNTs growth by microwave heating-chemical vapor deposition (MH-CVD). Consequently, selective growth of well-separated single carbon nanotube is realized. The present method has potential applications in CNT networks, CNT nanodevices, etc.