Abstract
Abstract In this experiment,we discuss that grain sizes have different effect on C-V curve and P-E curve . The result is that the film of smaller grain size have high capacity and have smoother P-E curve than the flim of greater grain size measured at different areas . In the local P-E curve, we got different curve at different frequency.When the frequency is 500mHZ, we can see the local P-E curve . If we increase sweep time,the P-E curve will decay at 500mHZ and 5mHZ;how-ever,we can not see the same phenomenon at the frequency 50mHZ.