Abstract
This study has successfully demonstrated a microprobe sensor for neural recording. The first Si based neural probe has been implemented on SOI (silicon-on-insulator) wafer and then employed to detect the neural signal of crayfish. Moreover, the polymer was deposited on the microprobe backside. This polymer layer acts as a bonding agent for microprobe assembly. Thus, the monolithic in-plane 2D probes can be further integrated to form 3D probe array at low temperature. Moreover, glass is a dielectric and amorphous material which is more suitable for microprobe. Therefore, this study also manufacture glass based neural probe by glass reflow process, this 2D microprobe has embedded silicon vias for vertical integration of chips to further realize 3D microprobe array. Successfully neural recording from rat brain is also demonstrated.