- Title
- 以快速熱退火法製作之鈦化二矽薄膜在Si(001)基板上之磊晶關係
- Translated title
- 以快速熱退火法製作之鈦化二矽薄膜在Si(001)基板上之磊晶關係
- Creators
- 王立明 (Author)
- Contributors
- 吳信田 (Advisor)
- Awarding Institution
- National Tsing Hua University; Masters
- Theses and Dissertations
- Masters, National Tsing Hua University
- Resource Type
- Thesis
- Language
- English
Thesis
以快速熱退火法製作之鈦化二矽薄膜在Si(001)基板上之磊晶關係
Masters, National Tsing Hua University
1998
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