Abstract
To tune the temperature region and temperature change of phase transition from anti-ferromagnetism to ferromagnetism in FeRh thin film, the FeRh thin film were prepared by using magnetron co-sputtering method with different composition. The crystal structure, composition, magnetic properties were measured by X-ray diffraction（XRD）, energy dispersive spectrometer（EDS）, and superconducting quantum interference device（SQUID） respectively. With phase transition above room temperature, large magnetocaloric effect and giant magnetoresistance, the CsCl FeRh has been focused because of these potential applications, such as refrigeration in room temperature, heat assisted magnetic recording medium and spin valve based devices and so on. However, FeRh belong to first order phase transition material which can be used only at the critical range of phase transition. Therefore, to expand the range of phase transition in FeRh thin film, lots of studies improved it by composition adjustment, doped, interface stress method. Especially, the temperature region and temperature change of phase transition were most sensitive to the composition. In this work, we focused on composition controlled, the FeRh thin films were prepared with different composition by co-sputtering method via tuning the occupied area between the iron foil and rhodium target on sputtering region. The results show that the FeRh thin film were epitaxial structure, and the FeRh thin film had a stress which might come from the substrate, and the composition dependence of the phase transition from anti-ferromagnetism to ferromagnetism were observed.