Abstract
There are many forward-looking inventions and technology output by academic institutions and university in Taiwan. But it often just stay in the laboratory stage, can not do a cooperation with the industry to create more value. The reason is the opinion for product commercialization is different between academic institutions and the industry. Therefore there is no way to do an efficient communication and cooperation. If we try to use the professional development process from industry plant to commercialize the valuable inventions and technology from academic institutions, it will be a complement of good things. Our laboratory already has a laser interference lithography technology and development experience. We just get a good opportunities to do laser interference lithography machine development project with private company. This study attempts to use professional development process to develop the laser interference lithography machine, and record the develop process and ideas, and also can be used as the reference record for the project.