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以自適應共振理論網路II建構半導體研發階段黃金晶方粒子群聚分析
Thesis

以自適應共振理論網路II建構半導體研發階段黃金晶方粒子群聚分析

羅士健
Masters, 國立清華大學, 工業工程與工程管理學系
2010

Abstract

半導體 晶圓允收測試 因素分析 自適應共振理論網路II Semiconductor Wafer Acceptance Test Factor Analysis Adaptive Resonance Theory Network II
Semiconductor industry has played a prominent role in Taiwan manufacturing industry. In the semiconductor research and design stage, the semiconductor engineers would use test vehicle to retain the wafer acceptance test data(WAT) from the wafer, then the semiconductor engineers could find a best die by checking the WAT data. But there are some problems to find the best die by traditional ways, the first problem is that the amount of WAT data is quiet big, the second problem is that there are hundreds of dies in a batch of wafer. It’s really a big test for semiconductor engineers to find the best dies (golden dies) from such a large WAT data. Accordingly, this research aims to build a system model to analyze the WAT data at R&D stage basing on the golden dies which semiconductor engineers defined earlier to help semiconductor engineers find the golden dies. At first step, this research use factor analysis to reduce the WAT data amount. The second step, this research use Adaptive Resonance Theory Network II (ART-2) to cluster the wafer dies. Real WAT data during semiconductor fortification are collected from a semiconductor manufacturing company and were experimented through the presented analysis model. Therefore, the proposed methodology in this research can help the semiconductor engineer find the golden dies more quickly and efficiently, and the analysis time can be reduced during semiconductor fortification.

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