Abstract
Gas sensor operate by a variety of fundamentally various mechanism. Ionization gas sensor operate by fingerprinting the electrical breakdown characteristics of distinct gases. This work presents the successful operation of an ionization gas sensor with gap spacing of 3-30 um and using nickel as electrodes material. The device is chip based and fabricated using micro-electro-mechanical system. We report the breakdown voltage of Helium, Argon, air, Carbon dioxide, Nitrogen and Oxygen of 3-30 um gap spacing in 760 torr. The sensor show good sensitivity and selectivity, and unaffected by temperature, humidity, and gas flow. The experimental data show alike tendency of Paschen’s curve.