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以電泳法孕核方式成長超奈米晶鑽石薄膜於矽基板與碳化鎢基板之研究
Thesis

以電泳法孕核方式成長超奈米晶鑽石薄膜於矽基板與碳化鎢基板之研究

張庭熏
Masters, 國立清華大學, 材料科學工程學系
2010

Abstract

電泳沉積法 超奈米晶鑽石薄膜 Electrophoresis Ultrananocryatalline diamond
In this work, we report the utilization of nano-diamond layer electrophoresis-deposited on Si to perform as a nucleation layer for growing ultra-nanocrystalline diamond (UNCD) film using microwave plasma-enhanced chemical vapor deposition (MPECVD) system. The morphology of the as-deposited diamond nanoparticles and UNCD films are studied by field emission scanning electron microscope (FESEM). Raman and electron field emission (EFE) studies reveal that the obtained UNCD films derived from electrophoresis possess the same performance as a nucleation layer obtained through the ultrasonication method. Moreover, we also demonstrate the growth of UNCD film onto Si nanowires (SiNWs) and tungsten carbide (WC) through the electrophoresis nucleation technique. Electrophoresis nucleation provides a better aligned SiNWs than ultrasonication technique. Enhanced EFE properties are also observed for UNCD nanoemitters on electrophoresis nucleated SiNWs. For the WC substrates, both ultrasonication and electrophoresis nucleations can promote the growth of UNCD films successfully. In addition, UNCD films on electrophoresis nucleated WC substrates also shows better EFE properties.

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