Abstract
With the progress of medical technology and robotics, the demand of tactile sensor is more and more important. In the application of tactile sensor on robotic fingers, in order to control the size of normal force to avoid the damage by grab the object, we need to detect the shear force caused by sliding between robotic fingers and objects to let robotic finger accurate control the normal force. This study proposes a tactile shear force sensor combined with silicon and PDMS. With combining the SOI wafer and fill-in technique to achieve the device without silicon spring and reduce the influence of normal force to the shear force to complete the tactile shear force sensor. The device’s characteristics are summarized as follows: (1)Using PDMS as device’s dielectric layer can increase dielectric constant and capacitance value. The PDMS also can protect the device form damage. (2)The most important is the design which PDMS can replace the function of silicon spring of modulate stiffness. Changing the mix ratio of PDMS can provide the device different sensitivity and sensing range. (3)Using CNT or Silicon spring as electrical routing.