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使用LIGA製做1THz TE01模式轉換元件
Thesis

使用LIGA製做1THz TE01模式轉換元件

鄭怡升
Masters, 國立清華大學, 物理系
2013

Abstract

模式轉換器 兆赫波 微影製程 同步輻射光 時域譜量測 圓柱波導管 Mode convert THz LIGA X-Ray lithography TDS system Cylindrical waveguide
The thesis containing design and fabricate the TE01 mode convert at THz band to establish a high-efficiency and high-precision X-ray lightgrophy technique. The technique is application to fabricate TE01 mode convert of 0.238mm thickness at THz band, and this mode convert can be used to provide a purity TE01 source for a low-loss cylinder waveguide. At design part, we use high-frequency structure simulation(Ansoft HFSS 13.0) to design our element. Due to TE01 mode is high order mode in cylindrical waveguide, so we using side wall coupling way (Y-type structure) to excite it. As the injected THz wave (TE10) travels to the first power-dividing junction, it would be split into two signals with equal amplitudes and phases. These two signals keep propagating forward and will be subsequently divided into four sub-signals by the additional two power dividers (Y-shaped). The four arms of the second-stage power dividers finally attach on the side wall of cylindrical waveguide with the symmetric spatial orientations. When the foul equal-amplitude and equal-phase TE10 waves are led into this mode-converting section, their linearly-polarized electric fields circumnavigate the cylindrical waveguide and hence jointly excite the TE01. Finally, the very high-purity circular TE01 mode will emerges at the output end. At fabricate part, we use LIGA process to fabricate the mode convert, and we select KMPR as our photoresist because it can be removed easier than SU-8 by chemical method.

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