Abstract
In this study, it is dedicated to employ a simple, fast, low cost and low temperature process to fabricate an anti-reflection sub-wavelength structure. The utilization of anti-reflection sub-wavelength structure can reduce the reflection of light at the interface between air and the solar cell, which possesses different refractive indices from air, and is expected to improve the solar cell conversion efficiencies. and further reduce the cost of electricity. By utilizing sol-gel method combined with spin coating technique, the random shell-type and bowl-type arrays of titanium dioxide anti-reflection sub-wavelength structures were successfully produced. The influence of anti-reflection structure morphology (shell-type and bowl-type) on the anti-reflection performance is discussed. It was observed that the bowl-type anti-reflection structure performed better. By controlling the thickness of anti-reflection layer, the anti-reflection wavelength region changed accordingly. It is discovered that the bowl-type_(diameter ~400 nm, depth ~25 nm ) anti-reflection structure with a thickness ~54 nm demonstrated better anti-reflection performance with an average reflectance of 7.78 % than polished silicon did (~35.8 %) in the wavelength range of ~400-800 nm.