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使用創新組裝平台之可撓式雙面微針陣列
Thesis

使用創新組裝平台之可撓式雙面微針陣列

陳立仁
Masters, 國立清華大學, 奈米工程與微系統研究所
2009

Abstract

微針 陣列 可撓 雙面 聚亞醯胺 電鍍 microprobe array flexible dual-side polyimide electroplating
To help scientists solve the mysteries of the brain and reveal human potential, several kinds of devices have been developed. Among them, the microprobe array is the lightest and provides highest spatial resolution. In this study, a microprobe array with dual-side microprobe was designed and fabricated to gather wide area and high resolution signals. In this research, I bonded 2 single-side microprobes to form a dual-side microprobe. Single-side microprobes were made and then bonded to dual-side microprobes. This method provides a higher yield than making dual-side microprobes on a wafer throughout. Two kinds of the microprobes with different length, 5 mm and 10 mm, were made. Then I assembled the microprobes with the novel assembly platform to form a microprobe array. Each microprobe array consists 2 dual-side microprobe and provides 16 recording sites. The polyimide was used as the substrate of microprobe and assembly platform. No fragile materials like silicon or glass are used, so this microprobe array won’t break during experiment. It not only enhances the safety of experiment but also is more convenient for use. The microprobe array was then immersed in PBS ( Phosphate buffered saline) and tested by the LCR meter. The measured impedance is 91kΩ at 1kHz ( a typical frequency of action potential ). After making sure that the microprobe array can function well in solution, I used it to measure the neuron signals from crayfish nerve cord and zebrafish heart. The device’s recording ability was verified by measuring the signals successfully. Finally, I applied the same design on a commercial flexible PCB ( printed circuit board ) made by a PCB foundry. A compact version of the microprobe array with smaller volume and lighter weight was achieved. It will be more convenient for implanting on small animal for long-term experiment.

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