Abstract
In this thesis, the modified grating multi-crystalline solar cell was fabricated by reactive ion etching and laser pattern. We analyzedstructure morphologies by SEM to make sure it is modified gratingstructure, and measured reflectance of each structure to verify our though which High aspect ratio is lower reflectance than low aspect ratio structure. According to our research, it is difficult to deposit the anti-reflection coating(ARC) also passivation on high aspect ratio structure by PECVD. That induce high aspect structure is higher reflectance in some wavelength and lower Voc than low aspect ratio structure. In solar cell fabrication, we added a extra damage elimination process by HNO3/HF/H2O=50:1:20 into our process, it can increase minority carrier lifetime effectively. Last the best solar performance in this research Voc is 0.51 v Jsc is30.73 mA/cm2 F.Fis0.68 and efficiency is 10.6%