Abstract
研究的目的是針對使用在X光光刻步進機 (Stepper) 中，由線性馬達驅之X-Y平台做快速定位控制。為求縮短製程時間，平台在快速移動的同 ，如何增加穩定度與維持定位精度即成為本文設計控制器的要求。賑膍s的第一部份為依據晶圓曝光路徑，規劃系統位移命令；利用電氣方{式對線性馬達做了簡單的推導，將X-Y平台的位置視為系統輸出，加入□咩@為系統干擾，建立系統數學模式並分析其特性。臚G部份為利用線性馬達與荷重之運動特性，藉由系統模擬，設計符合要D的模式切換型控制器，使其對於系統參數的改變，諸如荷重與線性馬達u圈溫度變化，能適時修正控制器參數，讓系統易於穩定並提高控制器的j健性，因而在水平方向達到快速定位的要求。在不同移動距離方面，本撟鴭饃惆蹌匱W益與切換點位置的選擇，提供了修正值與其可能的趨勢，怞像W則將可獲得較佳的系統響應。The purpose of this study is focused on fast positioningontrolof the X-Y table for X-ray lithography stepper with linearotors.The primary requirements of this controller are to enhancehestability of the system and maintain positioning precisionhilethe X-Y table is moving at fast rate.he first part of thisstudy is to design the command of systemovement based on thepath of wafer exposure. A simple derivations done on linearmotor based on electrical equations. Take theosition of X-Ytable as system input, load added as systemisturbance, toestablish mathematical model of the system andnalyze itsproperty.he second part is to simulate the system withkinematic propertyf linear motor and the load in order todesign a switching-modeontroller that meets the requirements.So that the system isobust and tend to be stable against loadand temperature changef coil of linear motor. The system shouldbe able to modifyarameters of the controller in time as aresponse to changesn parameters of the system. So it mayachieve requirements ofast positioning.