Abstract
This study, we present nanoporous anodic aluminum template transformation technique to fabricate novel sensor. Using this technique to design, analysis and fabricate novel pizeoresistance sensors. They are temperature sensor, strain sensor and bending curvature sensor. Now the day, the technology of Micro- Electro- Mechanical System (MEMS) is primary using the semiconductor manufacture technology to manufacture micro system on silicon substrate. These days, with scale is going down to nano scale structure, the facilities of traditional manufacture in nano structure are expensive and spend lots of time becoming the largest problem in manufactory nano devices. Therefore, in this paper, we integrate metal thin film deposited on np-AAO template formatting nano-texture structure on silicon substrate and flexible PET substrate to develop sensor of novel sensing characteristics. By using two step anodizing fabrication process and micro/nano fabrication process to improve the adhesion between flexible substrate and metal thin film. This study has been succeed developed novel type of pizeorsistane of pizeoresistance sensor. The novel temperature sensor, strain and bending curvature have been analyzed characteristic and simulation verified. In the future, it could be used for novel low temperature fabrication process for pizeoresistance sensors in the future.