Abstract
In this study, we develop a novel nano drug delivery system for single-cell chip, which includes cell culture cavities and nano fluid delivery channels for localized drug delivery onto single cell. In order to clear the observation path for optical microscope, single-cell was incubated on a transparent silicon nitride membrane, and drugs were delivered surrounding the cell from the nano channels underneath the membrane without the influence of observation. Chip fabrication and flow testing in the nano channel has been successfully carried out, and demonstrated a promising result on localized drug delivery for single cells.