Abstract
This study presents two different CMOS-MEMS microphone designs with serpentine spring structure. The serpentine spring structure not only can decrease the stiffness of diaphragm but also can change the diaphragm motion into piston-type movement to improve the microphone sensitivity. On the other hands, by using thick structure and material arrangement can help to resist the bending which caused by residual stress effect. Array type microphone design which can enhance device sensitivity also has be included in this work. In microphone design, computer-assisted software had been use to simulate the properties of micro-structure. The microphone had been implement by using TSMC 0.18μm 1P6M fabrication process, and in-house post-CMOS process. Finally the measured microphone mechanical and acoustic properties would be given. According to the measurement results, two of microphone design had been implement successfully. Array type microphone could effectively enhance device performance. In addition, special diaphragm design could also improve the sensitivity in single type microphone.