Abstract
This study intends to measure and analysis the dynamic characterization of single-phase disc-type ultrasonic actuators that includes threes kinds of design idea by the Mirco Precision Mechanical Electronics (MPME) group at the National Tsing Hua University.The disc-type ultrasonic actuators in general comprise, a piezo buzzer (PZT, Pb(Zr0.52Ti0.48)O3) as a single-phase driving source, where a Ni back-plate with 3 : 4 : 5 divided in angle is designed. The Ni back-plate, about 0.1 mm thick, is divided by means of bolt-anchored (the fixed type), U-shaped thin slit-notched (the noted type), and reinforce-reflected dividing (the reinforce-reflected type), respectively. A voltage of ±6 V is applied to the PZT. A commercial software (ANSYS) used to simulate the harmonic modes for the above three kinds of actuators. Before the ANSYS modal analyses, an HP 4194 A Impedance/Gain-Phase Analyzer is used to scan the resonance and anti-resonance frequencies of the actuators. Various boundary conditions for these three kinds of actuators are analyzed by the ANSYS in this study. Thus the dynamic characterization (linear velocity, driving torque and energy efficiency) can be explained by the assistance of the ANSYS simulation.Experiments show that the capabilities of dynamic performance ( i.e., linear velocity, driving torque and energy efficiency) are increased significantly to about 200﹪for the notched type and the reinforced- reflected type as compared to those of the fixed type.