Abstract
This study presents a novel inductive-type tactile sensor with deformable polymer layer. The sensing principle of the structure is mainly dominated by the distance between sensing coil and metal contact interface. After applying the load on the metal contact interface, the polymer filler above the sensing coil would deform which decrease the distance between sensing coil and metal contact interface. Hence, the inductance of the planar coil would change due to the change of magnetic flux. CMOS-MEMS 1P6M standard process is utilized because of its great electrical routing ability, therefore, we can have high compact coil at specific area. By designing the sensing coil, controlling the thickness and varying the mechanical property of polymer, different sensitivity and sensing range of the tactile sensor can be derived. The preliminary simulation result shows the feasibility of such idea. The measurements of the sensor are carried out after fabrication to verify the sensing mechanism, and the wireless sensing capability is also demonstrated. Furthermore, the performance of the device integrated with the chrome steel ball is implemented. After the characterization of the basic performance of the inductive tactile sensor, the other testing conditions are fully discussed in the thesis. Finally, the specification of the device is presented.