Abstract
This thesis demonstrates the design, fabrication and characteristics of a novel 2-axis microstage. The stage is supported by curved-beam spring and driven by two Lorentz force actuators. By modulating the magnitude and direction of the linear actuators, the stage can perform 2-axis in-plane motions. The microstage has two merits: (1) Lorentz force actuator with snap-through characteristic to enlarge the microstage displacement, (2) curved-beam spring to enable the 2-axis positioning. Measurements show the typical microstage has a planar size of 3mm□3mm with output displacements of ±13 μm in X and Y-axis. Also, the decoupled capability (<2~10%) and dynamic response time (<20ms) are presented in this thesis.