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利用原子力顯微術研究PZT薄膜之微觀鐵電特性
Thesis

利用原子力顯微術研究PZT薄膜之微觀鐵電特性

陳品任
Masters, National Tsing Hua University
2000

Abstract

鐵電薄膜壓電係數d33壓電反應極化殘留極化原子力顯微術 PZTd33piezoresponcepolarizeremant polarizationAFM
We report quantitative determination of the piezoelectric coefficient d33 of a lead-zirconate-titanate film by measuring the piezoresponse in . The experimental configuration consists of tip/PZT/bottom electrode. Various tips were employed for experiment and the highest piezoresponse was obtained with the use of a Au-coated tip. After taking into a local field enhancement factor of 10 in the configuration, the obtained final value of d33 is 70 nm/V. The value is in good agreement with values reported by similar experiments but with an additional top electrode, and also with results from interferometric methods.

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