Abstract
We report quantitative determination of the piezoelectric coefficient d33 of a lead-zirconate-titanate film by measuring the piezoresponse in . The experimental configuration consists of tip/PZT/bottom electrode. Various tips were employed for experiment and the highest piezoresponse was obtained with the use of a Au-coated tip. After taking into a local field enhancement factor of 10 in the configuration, the obtained final value of d33 is 70 nm/V. The value is in good agreement with values reported by similar experiments but with an additional top electrode, and also with results from interferometric methods.