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利用同步輻射光研究退火對非晶Fe/Pd多層膜轉變為序化FePd合金膜之結構變化
Thesis

利用同步輻射光研究退火對非晶Fe/Pd多層膜轉變為序化FePd合金膜之結構變化

朱家進
Masters, 國立清華大學, 工程與系統科學系
2013

Abstract

濺鍍 多層膜 鐵鈀材料 退火時間 Sputtering Multilayer FePd Annealing time
We aimed to study the local structure change as amorphous FePd multilayer transformed into the ordered face-center-tetragonal FePd under annealing. [Fe (2 nm)/Pd (2 nm)]30 multilayer on MgO [001] substrate were prepared using a home-built magnetron sputtering system. As made samples were annealed at 2, and 10 hours at 700 ℃ in high vacuum condition. From the EXAFS analyses for the nearest scattering paths of Fe-Fe and Fe-Pd, we found that despite the inversive change in the lattice parameters c and a, the c/a ratio and cell volume of the FePd became smaller which demonstrates a more compact structure of FePd as an effect of longer annealing time.

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