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利用壓印技術於聚醯亞胺基板製造低通濾波器之研究
Thesis

利用壓印技術於聚醯亞胺基板製造低通濾波器之研究

林威呈
Masters, 國立清華大學, 電子工程研究所
2007

Abstract

聚醯亞胺 壓印 polyimide imprint
In this thesis, we fabricate low pass filter on flexible substrate, polyimide, by imprint technology. First, we use advanced design system to decide length and width of pattern on Si mold, then sputter metal on mold and imprint metal on polyimide. We will discuss the factors that influence imprint results, including surface treatment, and parameters of the imprint process. As the result of this experiment, pre-coating F13TCS on mold and doing wet treatment to polyimide with strong NaOH solution can improve the imprint. At last, we imprint low pass filter on polyimide successfully by the mold that made with traditional lithography technology. As the results of measurement, the low pass filters attenuate the signal level when the frequency of signal is higher than the cutoff frequency. We make the portability of low pass filter more possibilities, because we avoid large size of traditional passive components and we make low pass filter on flexible substrate.

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