Abstract
In the field of optical alignment platform, commercially available optical alignment of the products are mainly mechanical package, but this package is not only misplaced poor tolerance, but also low yield, large size and high cost. Effectively solving this problem, we propose the use of MEMS process technology to produce a micro-optical platform aligned by single-crystal silicon microstructures, the use of automated coupling light package, not only high integration, but also high misalignment tolerance, small size, and low production costs. This study presents a novel micro optical alignment platform, combined with the thermal and magnetic actuator of the design concept, with appropriate insulation PDMS as an object of isolated coupling to the popularity of the silicon substrate processing production, processing and dispensing of the way research the micro-optical alignment platform. Research analog design parameters of the different elements of the structural finite element analysis software to give the best of the actuator structure induced trend. Through actual component production, measured the amount of displacement of the actuator to generate, in addition to proof the concept design of this study’s feasible, we can understand insulating material actuator, the performance, fix their problems and improve for it. This study presents a miniaturized optical alignment stage, the volume of the reaction speed, low power consumption, and system integration advantages. End of the paper also proposes a number of next-generation micro-optical design of the alignment stage to expect a better alignment of the micro-optical platform performance, and a wider range of applications.