Abstract
This work presents the formation of carbon nanotubes (CNTs) by direct-writing techniques using KrF excimer pulse laser. The pulse laser energy was applied to irradiate amorphous carbon (a-C) with Ni catalyst underneath for the transformation of carbon species into CNTs. After various calibrations and analyses, it was found that CNTs could be synthesized successfully by this approach under proper conditions. On the other hand, it was also found an appropriate combination of pulse laser intensity and combined and a-C thickness is the key parameter to determine CNT growth. In this work, CNTs were further grown in 9 μm via-pad using laser direct writing with I-V curve showing the ohmic behavior and metallic characteristics of CNT via-pad.