Abstract
Surface acoustic wave (SAW) device have advantages of small volume, lightness, low costs, high IC-compatibility, and better filtering performance. Different piezoelectric materials can be selected to fabricate various filters with dissimilar wave band, and these SAW filters have become key components of wireless communication and mobile phone. Except for satisfactory signal processing application, SAW devices, which have excellent characteristic of high mass sensitivity, have been further applied to bio-sensing areas in the recent decade. SAW devices can be used to sense mass, density, humidity, concentration, vapor recognition, viscosity, and so on. This thesis presents a SAW oscillator using SAW device and feedback amplifier. The center frequency and the insertion loss of SAW device are 121MHz and -6.945dB respectively. The output frequency and power of oscillator using SAW device is 121MHz and 15dBm respectively. We deposition Self-Assembled Monolayer and adsorption Au nanoparticle on SAW device. The frequency shift on SAW device due to mass loading effect on spectrum analyzer. We comparison the relationship between the mass loading and the frequency shift that adsorption Au nanoparticle on SAW device. In the end, we can establish SAW platform to perform bio-chemical sensing.