Abstract
Aluminum doped zinc oxide (AZO) films on glass were formed by blade coating of the prepared solution containing well dispersed in 4~6 nm AZO particles first and followed by supercritical CO2 drying and calcination at 500 ℃ for 2 h. After a systematic study of the effects of various operation variables on supercritical CO2 drying, the AZO films with a thickness more than 1000 nm without any cracks in one preparation step were found to form at the most appropriate operation conditions of a temperature of 40 ℃, a pressure of 2100 psi, a CO2 flow rate of 800 mL/min, and a drying period of 2 h. A chemical plating method was used to infuse more AZO into the pores of the film after the calcination of the AZO film treated with supercritical CO2 drying. The transmittance of the finalized film could be as high as 93% and the conductivity was of 2.05*105 Ω/□.