Abstract
This thesis reports novel coil-less micro scanning mirrors driven by the magnetostatic force resulted from magnetic interaction as well as the Lorentz force induced by eddy current. This design eliminates complicated coil routing and insulation layer deposition, and simplifies fabrication allowing easy integration with micromachining and CMOS processes. Bulk micromachined 1-axis and 2-axis scanning mirrors are demonstrated, displaying 1D and 2D scanning patterns. The 2D scanning patterns are easily tuned by varying the combination of driving frequencies. The results show that the diamagnetic (Cu) mirror is mainly driven by the eddy current induced Lorentz force, while the ferromagnetic (Ni) mirror is mainly driven by the magnetostatic force.