Abstract
This research is introducing the status and development of semiconductor in Taiwan first, and analyses mask industry. Taiwan Mask Corporation (TMC) is an example to describe competitive advantage and strategy.Mask is one of the most critical tools used during IC manufacturing process. After ordering, the tooling engineer first integrates customer’s data known as the pattern using CAD software, followed by e-beam or laser beam writer that prints the circuits onto the photoresist-covered mask blank. After the process of developing, etching and Stripping, the mask blank becomes the glass mask which must go through measurement of critical dimensions, registration and defect inspection to meet customers’ requirements.Taiwan Mask Corporation, as one of the leading mask manufacturers in Asia Pacific region, is the most famed of its specialty in this field with fully equipped factory. The first mask shop founded in Taiwan since 1988 spinned-off from ERSO/IRTI ensures TMC’s prominent position under the well-experienced practices. In line with management objectives of maintaining quality and putting service first.Based on the persistent R&D as well as practical experiences within 26 years, it’s approving that TMC is absolutely capable to keep the pace of development in IC industry field to create a strong and steady system in midst. Currently TMC have launched the mass production of 0.18 and 0.15 micron masks, by using OPC&PSM mask. Furthermore, TMC is devoted to the movement on 0.13 um, 0.09 um masks and NGL masks as a common target.According to the lithography requirement is blooming for advanced mask on 90nm ~ 130nm wafer fabrication. TMC set up an advanced mask process by using CAR (Chemically Amplified Resist), high end E-Beam pattern generator and dry etching technology for advanced mask mass production. TMC can not only increasing capacity, shortening circle time and also set up different process type for OPC, PSM and advanced mask. These high quality masks accompany with best service, TMC can meet all the requirements of different customer and lithography.