Abstract
Semiconductor Industry of Two Trillion and Twin Star Industries Development Plan are prosperous under the Government’s impetus. The density of 12-inches wafers Fab. in Taiwan is the highest in the world and the technique of semiconductor process with 65 nanometer mass production is developed quickly. The cost of semiconductor Fab. is huge, and thus in addition to concern the capacity and yield, we should emphasize more on the safety of human, equipment, and the contingency capability of the disaster. The mechanism of facility monitoring center is an important function to maintain the safe and normal operation for the Fab. wafer production. It is also critical for the duty engineers to be able to handle the alarm of facility management control system and the contingency.In this study, a case-based reasoning expert system is established to assist the duty engineers to deal with the alarms in the facility management control system and prevent the serious property loss.This expert system has been verified through conducting an experiment in the plant. The experimental result demonstrated that although the process time was not reduced significantly, engineers’ procedure accuracy was enhanced and number of system errors was reduced significantly. The result of questionnaire indicated that engineers were satisfied with this expert system.