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半導體產業之循環經濟應用-以晶圓載具回收再利用為例
Thesis

半導體產業之循環經濟應用-以晶圓載具回收再利用為例

陳延方
Masters, 國立清華大學, 高階經營管理碩士在職專班
2017

Abstract

循環經濟 晶圓載具 回收 Circular Economy Wafer Carriers Recycling
Circular economy thinking has gradually attracted worldwide attention. Taking Semi-conductor industry as an example, wafer carriers application needs to ensure that the wafers are still safe under a variety of manufacturing processes. Furthermore, it explains how to recycle discarded wafer carriers by utilizing sophisticated cleaning equipment and a complete inspection process in order to achieve the circular economy applied in the wafer carrier recycling mode and future development & trends.

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