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半導體蝕刻製程專家系統之建構
Thesis

半導體蝕刻製程專家系統之建構

郭文嘉
Masters, National Tsing Hua University
2009

Abstract

半導體製造教育訓練VBA軟體專家系統蝕刻製程 Semiconductor manufactingTrainingVBA softwareExpert systemEtching process engineering
The market share of Taiwan semiconductor manufacturing industry is in the first place in global. The production mode has to be continuously keeping high output value and equipment utilization. In this way, the engineers are requested to be on call at any time. Moreover, for the demand of process, the engineers have contact some noxious chemicals very often, such as HF, H2SO4 etc. It raises working risk and causes high labor turnover rate. Consequently, the company is often eager to expect a new employee could offer some contribution quickly to ease the department’s burden.As far as the etching department in E-company is concerned, the inner-training resources are gathered and integrated inefficiently. A new employee is often perplexed to learn. In order to let a new employee learns easy, This research attempts to combine the section’s resources and shorten the time of dealing with the abnormal products through developing the expert system.In this research a expert system is developed by the VBA (Visual Basic for Applications) software of Excel to achieve the goal of shortening a new ET/PE employee’s training time and retaining the experts’s (senior engineers’s) coping strategy with abnormal products. The expert system takes the etching department’s (ET/PE in E-company)documents of handing the abnormal products as the database, sets up the expert know-how rules by extracting the experts’s (senior engineers’s)experiences on dealing with the abnormal products, and by adopting If…Then… rule to be the determining standard of inference implement.The research results show, can be more rigorous thinking, reminding the engineers to do the right check and confirmation, to prevent abnormal large number of products. The exception data to search, That you can reduce the time and convenience for new employee to use. The new employee training and preventing these experiences losing have significant contributions for the enterprise.Keywords:Semiconductor manufacting, Training, VBA software, Expert system,Etching process engineering.

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