Abstract
39 technique parameters and 40 inventive principles of the classical Contradiction Matrix may not be effectively when applying to all industries. In terms of logical judgment, the characteristics of products and equipment may differ from different field obviously. The classical Contradiction Matrix and the inventive principles may be unsuitable for the semiconductor industry. This essay follow Altshuller’s method to establish a set of parameters、Contradiction Matrix and inventive principles focusing on the equipment and manufacturing process of semiconductor industry, and take on the following strategies to revise the original Contradiction Matrix and inventive principles for the equipment and manufacturing process of semiconductor industry. First of all, focusing on the single manufacturing process and equipment, then expand to other equipment and manufacturing process step by step. Second, revise and augment the original industry parameters to be suitable for the characteristics of the IC industry. Third, increase and revise the inventive principles. Fourth, coordinate the inventive principles responding to the Contradiction Matrix. By studying the relevant patents of CMP, we can induce the parameters、inventive principles and revised/updated Contradiction Matrix from TRIZ that are suitable for the CMP industry, and help to interpret the inventive problems of CMP. The improved Contradiction Matrix can not only be the solution triggers for CMP equipment and process, but also provide problem resolving with inspirational ideas. The contribution of this research includes: 1. Measure the accuracy of the classical TRIZ Contradiction Matrix for CMP problems.2. Revise the industry parameters to fit CMP process and equipment. 3. Increase three inventive principles and revise two of them. 4. Find new relationship between parameters and the inventive principles to fit CMP problems. 5. Use a Triplet to represent an inventive case with problem duplet and solution array. That would be beneficial to analyze with mathematical methods and computation for further studying