Abstract
The purpose of the work is to build a complete indices model of semiconductor equipment management and locate improvement opportunities and drivers for semiconductor manufacturers through benchmarking performance indices. The equipment management model is divided into eight sections, including equipment operation, equipment maintenance, equipment monitoring and automation, spare parts management, manpower management, vendor management, equipment cost management, and equipment management information system. Data is collected from 9 fabs and 5 equipment vendors by questionnaire and interviews. Our contributions include: 1)refining Equipment Management Model; 2)benchmarking performance indices in fab/module/machine level; 3)identifying improvement drivers; and 4)using data envelopment analaysis to dentify module equipment performance inefficiencies and quantitative reference for productivity improvement target, by using monthly move as output, numbers of key machines and direct labor as input. We use correlation to find out the relationship among performance indices and their determinants thus identifying several useful performance drivers for eqiupment management, including preventive maintenance time, mean time to repair, maintenance staff experience, verdor response time, and unused parts percentage, etc..