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噴印銅膜之低溫複合燒結技術
Thesis

噴印銅膜之低溫複合燒結技術

詹慧如
Masters, 國立清華大學, 奈米工程與微系統研究所
2014

Abstract

噴印 奈米銅 燒結 近紅外光 高強度脈衝光 電阻率 inkjet-printing copper sintering near-infrared intensive pulsed light resistivity
This research proposed a sequential copper nanoparticle sintering process, which includes low pressure drying, near infrared sintering, and intensive pulsed light reduction. This process was designed for copper nanoparticle inks with lower solid contents and larger particle sizes, making the reduced copper thin film by inkjet printing or coating having the sane order resistivity as the bulk one. The result proved that the low pressure drying accumulated copper nanoparticles during solvent evaporation, resulting flat surfaces for continuous sintering. The near infrared sintering was efficient because of similar near infrared and copper absorption spectra, improving the copper delamination resulted from intensive pulsed light-only sintering. The low intensive pulsed light dose was used for copper-oxide reduction and avoided uniformity issue of stitching multiple areas. The final copper thin film resistivity reached 7.1×10-8 Ω-m, which equals to 24 % of the bulk conductivity.

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