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在T型結構上可調變的及超窄侷域性表面電漿共振模態特性分析
Thesis

在T型結構上可調變的及超窄侷域性表面電漿共振模態特性分析

Chang, Zi-Chang
Masters, 國立清華大學, 電子工程研究所
2008

Abstract

Surface Plasmon 表面電漿
Abstract In recent years, surface plasmon is very popular topics in the nano optics. The thesis is major to study the feature which the coupling of metal film with specific periodic structure and incident light with infrared wavelength. The structure with T-shaped array not only employs the coupling of two SPP modes at interfaces Ag/SiO2 but also use the silver bridge. Depend on the silver bridge we can get better characteristic for localizing surface plasmon polariton. Because of the specific structures we will also demonstrate the alignment technique in nanometer pattern generation system. The accuracy of alignment can be smaller than 50nm. In simulation the other characteristics also been developed by using the theory of RCWA. Finally in the experiment we successfully obtain a tunable narrow localized surface plasmon (LSPP) mode by using the structure.

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